Development of an Optical Measuring Device for Rotation Accuracy of Micro–Spindle

Abstract

We have developed the measuring device which measures the run–out of a spindle axis by sensing the movement of the reflected laser beam from the target sphere attached to the spindle end and proposed the method for removing the effect of the unevenness of the light reflectance on the surface of a target sphere which can degrade the measurement accuracy. In this paper, we introduce the application to the condition close to the one of micro spindles, in which a small sphere is attached to the high–speed spindle. And also the response speed and the electric noise performance of the measuring circuit have been improved.