Proceedings of JSPE Semestrial Meeting
2007 JSPE Autumn Conference
Session ID : C63
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Oxygen Transmission Rate of Amorphous Carbon Film deposited by Pulse Plasma CVD
*Yuuki Ohsone, Hidetaka Nishi, Hiroya Murakami, Naoto Ohtake
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Keywords: Amorphous Carbon Film, Pulse Plasma CVD, Oxygen Transmission Rate
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[in Japanese]
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© 2007 The Japan Society for Precision Engineering
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