Proceedings of JSPE Semestrial Meeting
2007 JSPE Autumn Conference
Session ID : K61
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Study on highly stable control of MEMS mirrors by using ac drive
*Naru Nemoto, Joji Yamaguchi, Kunihiko Sasakura
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Keywords: MEMS, ac drive, PWM, AM
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[in Japanese]
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© 2007 The Japan Society for Precision Engineering
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