Proceedings of JSPE Semestrial Meeting
2007 JSPE Autumn Conference
Session ID : L32
Conference information
Study of three-dimensional nanoimprint technology
*Noriyuki Unno, Jun Taniguchi
Author information
Keywords: Electron Beam Lithograpy, Spin-On-Glass, Three dimensional nanoimprint
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (418K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2007 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top