Proceedings of JSPE Semestrial Meeting
2007 JSPE Spring Meeting
Session ID : C34
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Host: The Japan Society for Precision Engineering

A novel device for fixing small object using through pore porous Si - Fabrication of flow channels -
*mugen taiko, atsuko kato, masanori hayase
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Keywords: si, resist, channel
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[in Japanese]
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© 2007 The Japan Society for Precision Engineering
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