Ultra-precision machining and measurement for free-forms, microscopic-forms and high value-added materials

Abstract

Demands of the ultra-precision machine and measurement instrument having high performances has increased by the growth of the microfabrication and free-form machining. In this paper, the essential factor and example for them are described. And then the possibility of the ductile-mode cutting utilizing this technology are explained. In addition to, the effect of the linear motor driven applied for the measurement instrument are introduced.