One-Shot Profiling of Sharp Bumpy Surfaces

Abstract

The phase-shift method is a popular and widely used technique of surface profiling in industry. Since it requires multiple images for measurement, its accuracy could be degraded by disturbances such as vibration. To overcome this problem, methods that can measure the surface profile only from a single image have been studied. However, these ″one-shot″ methods tend to dull sharp bumps. In this paper, we propose a new one-shot method that can accurately measure the profile of sharp bumps.