Abstract
Recently, the spherical photodiode with incidence angle and uniform sensitivity can have been obtained. In this study, this device is utilized as a detector of position measurement system using the laser beam plane scanners. In this paper, multi points simultaneous measurement detector (MHD: Multi Heads Detector) and multi points simultaneous precision angle measurement unit (PAMU: Precision Angle Measurement Unit) were developed. As a result of the experiment, the rotation angle of the laser plane measuring accuracy is ± 10".