Ultraprecision Multi-axis Control Machining of Spherical Micro-Lens Array Mold

Abstract

The study deals with the milling of the mold of a spherical micro lens array. A diameter of each lens was sub-millimeter. To effectively shape each lens with high accuracy, a single crystal diamond tool, whose cutting blade was 90 degree or less, was used as an end mill. Using an ultraprecision milling machine, the tool rotating around its axis was feed along the desired radius of each lens surface. As a result, the mold with a spherical micro lens array was effectively shaped with high accuracy.