Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : C43
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Host: The Japan Society for Precision Engineering

Vertical-scanning shape-measurement interferometry applicable to vibrating environment
*Masaaki Adachi, Yuuki Hirano, Masanori Kawamura, Yuuta Iwao
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Keywords: 3D shape measurement, Vertical scanning interferometer, nano-meter precision, Vibration environment, Real-time displacement measurement
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Abstract

[in Japanese]

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© 2008 The Japan Society for Precision Engineering
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