Basic Study for Development of Micro Measurement Center (3rd report)

Abstract

This study describes about the development of micro measurement systems, which can measure the micro parts in high accuracy. The micro parts are machined by the Micro-factory that achieves the 'minimal-manufacturing', the concept for a rational production system. In this report, we developed the measurement system and the new contact type probe to measure the micro shapes and cylinders in multiply. We also propose and show the experimental results about a new method to evaluate the parallel and orthogonal of the measurement system.