Manufacturing of roughness standards with irregular surface topography and their replication for areal surface texture measuring instruments

Abstract

As demands for areal surface texture measurement increase, various types of areal surface texture measuring instruments are developed. However, the equivalences of measured data among different measuring principle do not hold, thereby the necessity of standards is discussed to calibration and verification of areal surface texture measuring instruments. In this study, areal roughness standards for the areal surface texture measurements are machined by an ultra-precision machine and then their replicas are developed. The areal roughness standards need irregular surface textures to verify the inherent characteristics on areal surface texture measuring instruments. The irregular surface texture data were generated by use of the non-causal 2D auto-regressive stochastic model. The roughness standards are measured by areal surface texture measuring instruments and the measured data are compared with the generated data.