Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : D39
Conference information

Host: The Japan Society for Precision Engineering

Super-Resolution Optical Inspection for Semiconductor Defects Using Standing Wave Shift
- Development of Basic Experimenntal Equipment for 2-Dimension Super Resolution-
*Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu
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Keywords: defect inspection, super-resolution optics, standing wave illumination
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Abstract

[in Japanese]

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© 2008 The Japan Society for Precision Engineering
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