Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : E20
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Host: The Japan Society for Precision Engineering

Development of deposition technique for TiNi(110) SMA thin film using Nb buffer layer
*Takehiro Sato, Takahiro Tezuka, Kazuyoshi Tsuchiya
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Keywords: TiNi SMA, ECR Sputtering, buffer layer, Thin film, Niobium
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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