Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : F36
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Host: The Japan Society for Precision Engineering

High-Accuracy Polishing of a Glass Wafer with a Soft Chuck
*Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida
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Keywords: soft chuck, glass wafer, high flatness surface, polishing, vacuum chuck, rigid polyurethane
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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