Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : G21
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Host: The Japan Society for Precision Engineering

Investigation on Ultra-Smoothness Polishing Characteristics of Glass Magnetic Disk Substrate
Influence of Polishing Fluid Supply Rate
Heiji Yasui, *Noriyuki Fukakusa, Kouhei Kusaba, Masataka Takagi
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Keywords: Polishing, Single Side Surface Polishing, Polishing Fluid Supply Rate
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Abstract
[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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