Abstract
We have been trying to develop a small three dimensional form measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect. In 4th and 5th report, I reported that its resolution is under submicron and its positioning accuracy with image processing 3D form measuring is under 2 μm. In this report, we tried to improve robustness, accuracy and measurable form by improvement of mechanisms and control approaches those are related the probe. And we show the result and measurement example of micro components.
