Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : I46
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Host: The Japan Society for Precision Engineering

Mechanical properties of micro-scale structures fabricated by FIB-CVD
*Hiroyuki Nakayama, Makoto Takagi, Akihito Matsumuro
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Keywords: microstructure
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Abstract

[in Japanese]

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© 2008 The Japan Society for Precision Engineering
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