Proceedings of JSPE Semestrial Meeting
2008 JSPE Autumn Conference
Session ID : I63
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Host: The Japan Society for Precision Engineering

Mechanical characteristic in micro scale of TiC thin film by sputtering
*Kenta Kasuya, Akihito Matumuro, Makoto Takagi
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Keywords: TiC, tribology
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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