Abstract
Microlens arrays are used in various optical communication devices and imaging devices. A fast tool control (FTC) unit-based diamond turning process is used for fabrication of micro lens arrays. To apply the FTC-based diamond turning for fabrication of large area and high quality microlens array, monitoring of the long time fabrication process is very important because the process is influenced by a lot of factors such as tool damage, tool wear, etc. The generated force at the interface between the tool and the workpiece surface is the best parameter to reflect the fabrication process. This paper describes a FTC-unit integrated with a force sensor, which is designed for in-process measuring the cutting force. Experimental results of in-process cutting force measurement are reported.
