Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : M32
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Development of non-contact three dimensional optical measurement system in all fiber interferometer
*Takefumi OhtaNorihiko NishizawaTetsuya OzawaKazuyoshi Itoh
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Abstract
Three dimensional measurements are attractive and desired techniques for various fields. In this paper, we demonstrate all fiber three dimensional measurement system with incoherent Michelson interferometer at eye safe wavelength of 1.55 m. The sensitivity and axial resolution are as high as 102 dB and 1.4 m from a few meter long distance, respectively. Moreover, this measurement system has achieved to measure the tilted metallic surfaces from 500 mm long distance.
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© 2008 The Japan Society for Precision Engineering
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