Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : N31
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Host: The Japan Society for Precision Engineering

Improvement of thickness distribution of the SOI by Numerically Controlled Local Wet Etching
Research Center for Ultra-precision Science and Technology, Osaka University
*Takuro Mitani, Kazuya Yamamura
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Keywords: SOI, numerically controled machining, HF/HNO3, wet etching
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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