2008 JSPE Spring Conference
Session ID : N45
Conference information
Host: The Japan Society for Precision Engineering
Development of Ultraprecision On the Machine Non-Contact Type Aspherical Measurement System (1st Report)
- Precision Measurement of High NA Aspherical Surface by Constant Normal Angle Controlled Scanning Method -
*Takahiko Kinoshita, Hirofumi Suzuki, Takashi Ohnishi, Katsuhiro Miura, Tadashi Okino
Author information
Keywords:
Aspherical measurement,
Non-contact,
On the Machine Measurement,
Laser probe,
Large sweep angle
Details
