Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : C10
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Host: The Japan Society for Precision Engineering

Study on Pad conditioning in Chemical Mechanical Polishing
Fine conditioning performance by flexible fiber conditioner
*Takashi Fujita, Akihiko Kurihara, Toshiro Doi
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Keywords: Flexible fiber conditioner, Surface reference conditioning, Pad surface condition, Removal rate, Fine conditioning
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Abstract
[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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