Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : F06
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Host: The Japan Society for Precision Engineering

Development on a nano-position sensing probe using circular motion of an optically trapped microsphere
*Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi
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Keywords: laser trap, nano-CMM, laser, three dimensional
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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