Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : F77
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Host: The Japan Society for Precision Engineering

Positioning of Sub-nm Level Resolution Using New Linear Actuator and Linear Motion Ball Guide Way.
*Yuuichi Itou, Jiro Ootsuka, Houng-Joong Kim, Hitoshi Shibata, Ikuro Masuda, Kaoru Saito, Hajime Onda, Toshiharu Tanaka, Hirofumi Oosawa
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Keywords: Linear actuator, Sub-nanometer resolution, Ultraprecision positioning, PID feed-back control
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Abstract
On the ultraprecision positioning device using a new type of linear actuator called Tunnel Actuator (TA) linear motion ball guide way and feed-back sensor of resolution 0.034nm, we could obtain a positioning resolution of 0.3nm, deviational error of 0.04nm and despersion error of 0.09nm for repeated step responses of 100μm stroke.
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© 2008 The Japan Society for Precision Engineering
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