Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : G23
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Host: The Japan Society for Precision Engineering

Charging model of micro-dielectric-object under the Scanning Electron microscopy and quantitative validation
*Hiroyuki Meguro, Shigeki Saito
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Keywords: MEMS, micro, dielectric, Scanning Electron Microscopy, charge, size effect
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[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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