Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : A45
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Host: The Japan Society for Precision Engineering

Micro Drilling into Silicon by Chemically Plated Diamond Tools
Hyunkil Park, *Hiromichi Onikura, Osamu Ohnishi, Takao Sajima, Ahmad Sharifuddin
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Keywords: Micro drilling, Silicon, Chemically plated tool, Helical drilling, Ultrasonic vibration
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Abstract
Microdrilling into silicon was investigated using chemically plated diamond tools. From the viewpoint of tool life helical drilling was most useful among the step drilling, helical drilling and drilling assisted by ultrasonic vibration.
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© 2008 The Japan Society for Precision Engineering
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