Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : J13
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Host: The Japan Society for Precision Engineering

Study on Ultra-Precision Polishing of Diamond Single Crystal
*Junji Watanabe, Mutsumi Touge, Akinobu Kashiwagi, Okiharu Kirino, Osamu Eryu, Hiroyuki Yokoi
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Keywords: daiamond single crystal, UV exitation, photo-chemical reaction, ultra-precision polishing, quarts plate, solid catalysis
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Abstract
Diamond single crystal was polished with quarts plate under UV irradiation. It is considered that semiconductor diamond is excited by UV and oxidated and the oxidated surface is removed by quarts plate. All crystallographic surfaces was polished to under Ra 0.4nm.
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© 2008 The Japan Society for Precision Engineering
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