Proceedings of JSPE Semestrial Meeting
2008 JSPE Spring Conference
Session ID : B04
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Host: The Japan Society for Precision Engineering

An Ultra Precision Production System Organized by Multiple Micro Robots
111th Report: Precision distance-measurement of micro robot movement
*Masahiro Taguchi, Naoya Hata, Ohmi Fuchiwaki, Hisayuki Aoyama
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Keywords: Micro Robot, piezoelectric actuator, linear encoder
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Abstract
[in Japanese]
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© 2008 The Japan Society for Precision Engineering
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