Abstract
Nano-scale mechanical properties, such as hardness, yield load and Young's modulus, are obtained from nanoindentation test. However, the results of the test are considerably affected by sample surface condition, nose configuration of tip, and so on. In this study, the oxide layer thickness of 99.99% and 99.9999% aluminums exposed in air is measured using an X-ray photoelectron spectroscopy (XPS), and nanoindentation test is performed on the aluminums with the oxide layer of several thicknesses. The oxide layer thickness increases with the period exposed in air, and the layer of low purity aluminum is thicker than that of high purity aluminum. In nanoindentation test, it is revealed that the yield load and hardness are considerably affected by the oxide layer on sample surface.
