Abstract
Diamond-like carbon (DLC) films exhibit low coefficient of friction and high wear resistance, and the DLC films are used as mechanical equipments and high wear resistance coating of tools. Recently, the corrosion of the substrate material due to poor film or micropores is came out as problems. Therefore objective of this study is the corrosion behavior of the DLC coated substrate materials. The DLC films were fabricated by pulse plasma Chemical Vapor Deposition (CVD) method and evaluated the corrosion behavior by the electrochemistry measurement with the anodic polarization method.