Ultra precision technology to form organic EL films using a fused technology combining spraying film formation method and CMP planarization method without using vacuum equipment (1st report)

Abstract

Organic El films, currently manufactured by a vacuum machine, are facing a serious problem to meet ever-growing film size and continuing low cost competition.To solve this problem, we propose the next generation of the ultra precision deposition technology to form organic El films without using vacuum equipment. This is a fused technology combining the spraying method to deposit EL films and CMP method that subsequently planarize the deposited films.