Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : N19
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Hiroki Aakenaga, Sayuri Kawashima, Keiji Miyachi, Toshiro Doi, Shuhei Kurokawa
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Keywords: Cleaning, Pad conditioning, High pressure micro jeto cleaning, nozzle, Droplets, Droplet velocity
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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