Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : C02
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Host: The Japan Society for Precision Engineering

Error Analysis of the Local Model Fitting Method in Single-shot Surface Profiling
*Tatsuya Yokota, Masashi Sugiyama, Hidemitsu Ogawa, Katsuichi Kitagawa, Kazuyoshi Suzuki
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Keywords: Surface Profiling, Single-shot Measurement, Local Model Fitting Method, Error Analysis
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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