Superfinishing of optical glass with CeO₂ stone

Abstract

Vitrified superabrasive stones containing cerium dioxide (CeO₂) were made and their performances were evaluated through the superfinishing of optical glass. Experiments showed that CeO₂ stones would have mechanochemical reaction with optical glass. After 30s superfinishing of CeO₂ stones, surface roughness of the glass was 2 nmRa, and there were almost no scratches on the glass. As the temperature of superfinishing rose, the finishing ratio rose, and finishing ratio at 313 K was 1.1. In addition, the removal rate also rose as the temperature of superfinishing rose, and removal rate at 313 K was 7 μm/min. Those results indicate that CeO₂ stones are highly effective to finish optical glass.