Ultrasonic nanoimprint on engineering plastics at room temperature

Abstract

We succeeded in the complete transcript of line / space pattern with the 1-um line width and 1-um depth on polyethylene terephthalate (PET) by using ultrasonic nanoimprinting. Molding conditions such as contact force, contact time, frequency, amplitude of ultrasonic vibration, and buffer materials were optimized for PET imprinting. Polymethylmethacrylate (PMMA), polycarbonate (PC) and other engineering plastics were imprinted under the same conditions. As a result, it was proved that the imprinted depth was changed according to the glass transition temperature of each engineering plastic.