Abstract
For small diameter of end-mills and grinding wheels, a high-speed precision aerostatic and aerodynamic bearing system is proposed. At the top of the spindle, an active aerodynamic bearing controlled by piezoelectirc actuators is incorporated. In this hybrid spindle, the weight of the spindle and the load are basically supported by aerostatic thrust and radial bearings, and the radial vibration occurred in the high rotational speed is suppressed by the active aerodynamic bearing. Final goal of the hybrid spindle is as follows: the spindle vinration is less than 0.1um at the maximum spindle speed of 100,000min-1.