Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : G02
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Host: The Japan Society for Precision Engineering

Evaluation of machined micro-lens array profile on machine
*YOUNGJIN NOH, Jung Chul Lee, Yoshikazu Arai, Gao Wei
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Keywords: fast tool control unit, piezoelectric force sensor, profile measurement on machine
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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