Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : G07
Conference information

Host: The Japan Society for Precision Engineering

CMM probing technique using optical fiber trapping (7th report)
Principle of position detection using the probe
*Sang In Eom, Yasuhiro Takaya, Terutake Hayashi
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Keywords: nano CMM, fiber optical trapping, probe
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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