2009 JSPE Spring Conference
Session ID : G13
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Host: The Japan Society for Precision Engineering
Three dimensional micro structured surfaces measurement by using an air bearing displacement sensor with extremely low measuring force
Non-interacting vibration scanning micro-ball stylus
*Yoshikazu Arai, Atsushi Shibuya, Takuro Endo, Wei Gao, Yasunari Nagaike, Yasushi Nakamura
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