Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : G15
Conference information

Host: The Japan Society for Precision Engineering

Development of laser trapping probe for the nano-CMM (Coordinate Measuring Machine) (4rd report)
Calibration method for laser trapping probe
*Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi
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Keywords: nano-CMM, calibration, Optical radiation pressure, Micro probe
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[in Japanese]
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© 2009 The Japan Society for Precision Engineering
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