Ultrasonic motor using a glass substrate and a surface acoustic wave transducer

Abstract

Recently, we have proposed a method of surface acoustic wave excitation and propagation on a glass substrate surface and its application for the ultrasonic motor. Although the motor worked successfully, a detail of driving phenomenon is unclear in the glass substrate ultrasonic motor yet. In this research, to expand the glass substrate motor with any shapes of the stator transducer, we investigated the detail of its driving mechanism.