Abstract
Ultrasonic actuators using a mode-coupled vibrator are able to be driven by a single phase power source, and some of them are able to move in both direction with switching driving frequency or driving electrodes. This type of an ultrasonic actuator has flexibility in choosing its shape, so that it is suitable to miniaturize and set up at an intricate space in comparison with mode-rotation type motor and that using degenerate modes of different form. In this paper, some types of an ultrasonic actuator using a mode-coupled vibrator are reported, and their constructions, operating principles and some examples of their performances are described.
