Development of transfer device using ultrasonic levitation(first report)

concept and fundamental experiments

Abstract

A noncontact transfer device using ultrasonic levitation and flexure traveling wave has some advantage in clean environment and simple device configuration. This report deals with the concept of a two-dimensional transfer device using ultrasonic levitation and fundamental experiments for this device. A one-dimensional transfer device was built and examined as a basis of a two-dimensional transfer device. A prototype of the two-dimensional transfer device with four bolted Langevin transducers was constructed based on the result of the fundamental experiments. Thrust by the flexure traveling wave was observed.