2009 JSPE Spring Conference
Session ID : J14
Conference information
Host: The Japan Society for Precision Engineering
Si Selective Epitaxial Growth by Atmospheric Pressure Plasma CVD
*Takayuki Ohnishi, Yutaka Kirihata, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake
Author information
Keywords:
atmospheric pressure plasma,
chemical vapor deposition,
selective epitaxial growth,
silicon
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