A truing Technique of Flattening Diamond Grains for Nanometer Grinding

Abstract

A truing technique that can flatten diamond grains on a hemispherical tool working surface with a mesh size of #1000 and tool radius of 0.2 mm was developed. Grinding test using glass-like carbon as a workpiece revealed that surface roughness of less than 10 nm Rz could be obtained by microgrinding.