Proceedings of JSPE Semestrial Meeting
2009 JSPE Spring Conference
Session ID : J76
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Fabrication of surface micro-structure by polymer elongation
*Hayato KobayashiArata KanekoNobuyuki Moronuki
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
Microstructures with high aspect ratio are required to provide various functions such as control of wetting, adhesion and so on. In this study, we introduce a novel method of fabricating such structures with high throughput. Light curing polymer was spun-coated on a glass substrate and its viscosity was modified with soft-baking. The polymer was elongated with wires by applying upward motion after dipping into the polymer. Then, the polymer was dosed by UV light and cured. By using this process, fiber-like structures, of which diameter 10 m with aspect ratio over 8 typically, were fabricated. And we investigated the relationship between the diameter of the structure obtained and the yield.
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© 2009 The Japan Society for Precision Engineering
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