Sharpening of AFM cantilever using FIB and it′s applications

Abstract

This study investigates a sharpening of cutting edge of AFM cantilever tip for micro machining using FIB and processing micro V-shape groove. This paper describes the effect of the rake angle of the cutting edge on the machinability of Ni-P alloy. As a result, it was found that the maximum groove depth and width with the cutting edge of 0 degrees. In addition, the aspect ratio depends on a point angle of the cutting edge and becomes about 1.5.