Measurement of sputtering rate of Ag with Ar ion beam

Abstract

Sputtering method is one of the machining methods that can control the surface profile within the range of nano-micro meters. In the present study, the sputtering rate was successfully provided by means of the precise measurement of the change in the mass of Ag-foil by irradiating Ar ion beam. The observed value was compared with that calculated by SRIM.